Substrate processing apparatus and noise impact reducing method
AssigneeTokyo Electron Limited
InventorKazuhito Yamada
Life of this patent
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Abstract
A substrate processing apparatus includes an AD converter configured to output digital values of a voltage applied to a heater resistor and a current flowing in the heater resistor; and a controller configured to control a temperature of the heater resistor by using a calculation voltage and a calculation current configured to calculate a resistance value of the heater resistor, which are obtained from an output result of the AD converter. The controller calculates at least one of the calculation voltage or the calculation current, based on a combination result of a digital signal obtained from the output result of the AD converter and a noise signal including a normal distribution noise.
Claims11
A substrate processing apparatus, comprising:
- an AD converter configured to output digital values of a voltage applied to a heater resistor and a current flowing in the heater resistor;
- and
- a controller configured to control a temperature of the heater resistor by using a calculation voltage and a calculation current configured to calculate a resistance value of the heater resistor, which are obtained from an output result of the AD converter,
- wherein the controller calculates at least one of the calculation voltage or the calculation current, based on a combination result of a digital signal obtained from the output result of the AD converter and a noise signal including a normal distribution noise.
A noise impact reducing method, comprising:
- acquiring a voltage applied to a heater resistor and a current flowing in the heater resistor as digital values by using an AD converter;
- and
- calculating at least one of a calculation voltage or a calculation current configured to calculate a resistance value of the heater resistor, based on a combination result of a digital signal obtained from an acquisition result of the acquiring of the voltage and the current and a noise signal including a normal distribution noise.
Dependencies are inferred from the claim text.