Edge patterns of microelectromechanical systems (mems) microphone backplate holes

A microelectromechanical systems (MEMS) device, comprising:

• a MEMS acoustic transducer;
• and
• a backplate structure of the MEMS acoustic transducer that is supported by a portion of the MEMS acoustic transducer around an edge at a perimeter of the backplate structure, wherein the backplate structure comprises a pattern of backplate holes comprising a first region of edge pattern holes located proximate the edge of the backplate structure and a second region comprising transition holes, wherein the pattern of backplate holes is adapted to reduce concentrated stress in the second region, wherein at least a set of the edge pattern holes are configured with a ratio of a length to a width of greater than one, wherein the length is defined in a first direction that is substantially parallel to a radial direction emanating from a nominal center of the backplate structure, and wherein the width is defined in a second direction that is substantially parallel to the perimeter of the backplate structure.