Cascadable mems logic device based on modes activation
AssigneeKing Abdullah University of Science and Technology
InventorsSherif Adekunle TELLA, Mohammad Ibrahim YOUNIS
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Abstract
A cascadable resonator logic system includes a substrate; a first straight beam anchored with a first end to the substrate; a second straight beam anchored with a first end to the substrate; a first arch beam, which is curved, and is attached with a first end to a second end of the first straight beam, at a first joint, and with a second end to a second end of the second straight beam, at a second joint, so that both the first and second ends of the first arch beam are suspended above the substrate; and a second arch beam, which is also curved, and is attached with a first end to the second joint, and a second end is anchored to the substrate.
Claims20
A cascadable resonator logic system comprising:
- a substrate;
- a first straight beam anchored with a first end to the substrate;
- a second straight beam anchored with a first end to the substrate;
- a first arch beam, which is curved, and is attached with a first end to a second end of the first straight beam, at a first joint, and with a second end to a second end of the second straight beam, at a second joint, so that both the first and second ends of the first arch beam are suspended above the substrate;
- and
- a second arch beam, which is also curved, and is attached with a first end to the second joint, and a second end is anchored to the substrate.
A method for performing a logical operation with a cascadable resonator logic system that includes first and second straight beams and first and second arch beams, the method comprising:
- applying a first input voltage to a first driving electrode, to bend the second straight beam, wherein a first end of the straight beam is anchored to a substrate and a second end is attached to ends of the first and second arch beams;
- flexing the first and second arch beams, which are floating above the substrate, except for an end of the second arch beam, to generate a first excitation mode, which is characterized by a first frequency;
- recording a first output (O1) of the first excitation mode;
- applying a second input voltage to a second driving electrode, to bend the second straight beam, wherein the first and second driving electrodes sandwich the second straight beam;
- flexing the first and second arch beams to generate a second excitation mode, which is characterized by a second frequency, which is different from the first frequency;
- and
- recording a second output (O2) of the second excitation mode, which is different from the first output (O1),
- wherein the cascadable resonator logic system works as (1) a half adder logic when both outputs are used, (2) as a XOR logic gate when only the first output is used, and (3) as an AND logic gate when only the second output is used.
Dependencies are inferred from the claim text.