Acoustic resonator device
AssigneeAvago Technologies International Sales Pte. Limited
InventorsRichard Ruby, Steve Gilbert, David Archbold
Life of this patent
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Abstract
The present disclosure provides an acoustic resonator device, among other things. One example of the disclosed acoustic resonator device includes a substrate having a carrier layer, a first layer disposed over the carrier layer, and a piezoelectric layer disposed over the first layer. The acoustic resonator device is also disclosed to include an interdigitated metal disposed over the piezoelectric layer, where the interdigitated metal is configured to generate acoustic waves within an acoustically active region. The acoustic resonator device is further disclosed to include an acoustic wave scattering structure.
Claims20
A device, comprising:
- a substrate;
- a first filter device disposed over the substrate, wherein the first filter device comprises a first interdigitated metal, wherein the first interdigitated metal comprises a first thickness extending in a direction perpendicular to a surface of the substrate;
- and
- a second filter device disposed over the substrate, wherein the second filter device comprises a second interdigitated metal, wherein the second interdigitated metal comprises a second thickness extending in the same direction as the first thickness, wherein the first thickness is greater than the second thickness.
A device, comprising:
- a substrate comprising a top portion;
- and
- an interdigitated metal of a filter device, wherein the interdigitated metal is disposed over the substrate, wherein the top portion of the substrate comprises an undercut adjacent to a finger of the interdigitated metal.
A device, comprising:
- a substrate;
- a filter device disposed over the substrate, wherein the filter device comprises an interdigitated metal;
- and
- an etch stop layer disposed between the substrate and the interdigitated metal.
Dependencies are inferred from the claim text.