Particle detector, particle detection apparatus, and particle detection method

A particle detection apparatus comprising:

• a housing;
• a sample holding member capable of holding a sample and provided within the housing;
• a particle detector provided within the housing such that a particle detection surface of the particle detector faces the sample holding member, the particle detector including
• a plurality of superconductive lines each including a superconductive material, the plurality of superconductive lines extending in a first direction and being arranged in a second direction intersecting the first direction,
• a plurality of conductive lines each including a conductive material, the plurality of conductive lines extending in a third direction different from the first direction and being arranged in a fourth direction intersecting the third direction, and
• insulating films each being interposed at an intersection point between one of the plurality of superconductive lines and one of the plurality of conductive lines;
• a first detection circuit configured to detect a voltage change occurring in the plurality of superconductive lines;
• and
• a second detection circuit configured to detect a current or a voltage generated in the plurality of conductive lines when the voltage change occurs.

A particle detection method implemented by a computer, the method comprising:

• detecting a voltage change due to particle incidence into one of a plurality of superconductive lines each including a superconductive material, the plurality of superconductive lines extending in a first direction and being arranged in a second direction intersecting the first direction;
• detecting, when the voltage change occurs, a current or a voltage generated in one of a plurality of conductive lines connected to the one of the plurality of superconductive lines through an insulating film, the plurality of conductive lines each including a conductive material, the plurality of conductive lines extending in a third direction different from the first direction and being arranged in a fourth direction intersecting the third direction;
• calculating a position of the particle incidence in the first direction, based on the voltage change occurring in the one of the plurality of superconductive lines;
• and
• calculating a position of the particle incidence in the third direction, based on the current or the voltage generated in the one of the plurality of conductive lines.