Different poly pitches for advanced integrated circuit structure fabrication
AssigneeIntel Corporation
InventorsAhmet TURA, Steven G. JALOVIAR
Life of this patent
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Abstract
Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a first plurality of logic gate structures having a first pitch between adjacent ones of the first plurality of logic gate structures. The integrated circuit structure also includes a second plurality of logic gate structures having a second pitch between adjacent ones of the second plurality of logic gate structures. The second pitch is greater than the first pitch.
Claims20
An integrated circuit structure, comprising:
- a first plurality of logic gate structures having a first pitch between adjacent ones of the first plurality of logic gate structures, wherein individual ones of the first plurality of logic gate structures have a first width;
- and
- a second plurality of logic gate structures having a second pitch between adjacent ones of the second plurality of logic gate structures, the second pitch greater than the first pitch, wherein individual ones of the second plurality of logic gate structures have a second width the same as the first width.
An integrated circuit structure, comprising:
- a first plurality of logic gate structures having a first pitch between adjacent ones of the first plurality of logic gate structures, wherein individual ones of the first plurality of logic gate structures have a first width;
- and
- a second plurality of logic gate structures having a second pitch between adjacent ones of the second plurality of logic gate structures, the second pitch greater than the first pitch, wherein individual ones of the second plurality of logic gate structures have a second width less than the first width.
A computing device, comprising:
- a board;
- and
- a component coupled to the board, the component including an integrated circuit structure, comprising:
- a first plurality of logic gate structures having a first pitch between adjacent ones of the first plurality of logic gate structures, wherein individual ones of the first plurality of logic gate structures have a first width;
- and
- a second plurality of logic gate structures having a second pitch between adjacent ones of the second plurality of logic gate structures, the second pitch greater than the first pitch, wherein individual ones of the second plurality of logic gate structures have a second width the same as the first width.
A computing device, comprising:
- a board;
- and
- a component coupled to the board, the component including an integrated circuit structure, comprising:
- a first plurality of logic gate structures having a first pitch between adjacent ones of the first plurality of logic gate structures, wherein individual ones of the first plurality of logic gate structures have a first width;
- and
- a second plurality of logic gate structures having a second pitch between adjacent ones of the second plurality of logic gate structures, the second pitch greater than the first pitch, wherein individual ones of the second plurality of logic gate structures have a second width less than the first width.
Dependencies are inferred from the claim text.