Bonded three-dimensional memory devices and methods for forming the same
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsShiqi Huang, Wei Liu, Bater Chelon, Siping Hu
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsShiqi Huang, Wei Liu, Bater Chelon, Siping Hu
Estimating the term…
Embodiments of bonded 3D memory devices and fabrication methods thereof are disclosed. In an example, a 3D memory device includes a first semiconductor structure and a second semiconductor structure. The first semiconductor structure includes a plurality of first NAND memory strings and a plurality of first BLs. At least one of the first BLs may be conductively connected to a respective one of the first NAND memory strings. The first semiconductor structure also includes a plurality of first conductor layers, and a first bonding layer having a plurality of first bit line bonding contacts conductively connected to the plurality of first BLs and a plurality of first word line bonding contacts conductively connected to the first conductor layers. A second semiconductor structure includes a plurality of second NAND memory strings and a plurality of second BLs.
A method for forming a three-dimensional (3D) memory device, comprising:
A method for forming a three-dimensional (3D) memory device, comprising alternatingly bonding a plurality of first semiconductor structures and a plurality of second semiconductor structures to form a stack structure comprising a plurality of pairs of bonded semiconductor structures, bit lines (BL) and conductor layers of at least one pair of bonded semiconductor structures being conductively connected through bonding, wherein forming the plurality of bonded semiconductor structures comprises:
Dependencies are inferred from the claim text.