Laser bonding system and laser bonding apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorGeun Woo KIM
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AssigneeSamsung Electronics Co., Ltd.
InventorGeun Woo KIM
Estimating the term…
A laser bonding system which improves bonding between a semiconductor chip and a substrate is provided. A laser bonding system comprises a laser bonding apparatus; and a controller configured to control the laser bonding apparatus, wherein the laser bonding apparatus includes a stage which supports a substrate including a pad, and a semiconductor chip including a connection terminal; a pressurizer which moves up and down above the stage; a temperature measuring sensor configured to measure a temperature of the semiconductor chip and generate a temperature value; and a laser radiation apparatus configured to bond a pad of the substrate and a connection terminal of the semiconductor chip, using a laser beam passing through the pressurizer, and the controller lifts the pressurizer in response to the temperature value.
A laser bonding system comprising:
A laser bonding system comprising:
A laser bonding apparatus comprising:
(canceled)
Dependencies are inferred from the claim text.