Processing apparatus
AssigneeDisco Corporation
InventorsAkiko KIGAWA, Nobuyuki FUKUSHI
Life of this patent
Estimating the term…
Abstract
When processing of all the wafers accommodated in a first cassette mounted on a first cassette stage is ended, the last wafer is conveyed out from a holding surface of a chuck table, and the holding surface becomes vacant, the wafer accommodated in a second cassette mounted on a second cassette stage is immediately conveyed onto the holding surface, by control by a conveyance control section. When the wafer to be held by the holding surface is changed from the wafer conveyed out from the first cassette to the wafer conveyed out from the second cassette, processing conditions are changed over to the processing conditions corresponding to the second cassette stage, by changeover control by a changeover section.
Claims2
A processing apparatus comprising:
- a first cassette stage on which a first cassette accommodating a plurality of wafers is mounted;
- a second cassette stage on which a second cassette accommodating a plurality of wafers is mounted;
- a chuck table that has a holding surface and holds the wafer on the holding surface;
- a processing unit that processes the wafer;
- a conveying-in mechanism that conveys the wafer onto the holding surface of the chuck table;
- a conveying-out mechanism that conveys out the wafer from the holding surface of the chuck table;
- a setting section that sets first processing conditions that are used at the time of processing the wafer accommodated in the first cassette mounted on the first cassette stage and second processing conditions that are different from the first processing conditions and that are used at the time of processing the wafer accommodated in the second cassette mounted on the second cassette stage;
- a selecting section that selects either one of the first cassette stage and the second cassette stage;
- a conveyance control section that, when processing of all the wafers accommodated in a cassette mounted on a cassette stage, according to processing conditions corresponding to the cassette stage selected by the selecting section, is ended and the last wafer is conveyed out from the holding surface, making the holding surface vacant, immediately conveys the wafer accommodated in a cassette mounted on the other cassette stage onto the holding surface;
- and
- a changeover section that, when the wafer to be mounted on the holding surface is changed from the wafer conveyed out from the one cassette stage side to the wafer conveyed out from the other cassette stage side, changes over the processing conditions to the processing conditions corresponding to the other cassette stage.
Dependencies are inferred from the claim text.