Substrate processing system and substrate processing apparatus

A substrate processing apparatus comprising:

• a load port;
• manufacturing process equipment comprising a plurality of process chambers;
• and
• a control server configured to control the manufacturing process equipment,
• wherein the control server is configured to convert a transporting order for a process cycle into a new transporting order for a new process cycle after a restriction on at least one process chamber, into which insertion of a semiconductor substrate is restricted, is lifted,
• wherein each process cycle is defined as an operation in which the semiconductor substrate is inserted from the load port into a process chamber to perform a semiconductor process and then returned to the load port after the semiconductor process.

A substrate processing apparatus comprising:

• a load port;
• a robot arm configured to transport a semiconductor substrate;
• manufacturing process equipment comprising a plurality of process chambers;
• and
• a control server configured to control the manufacturing process equipment,
• wherein
• the control server is configured to identify available process chambers, into which insertion of the semiconductor substrate is allowed, and unusable process chambers, into which insertion of the semiconductor substrate is not allowed, and
• the robot arm performs an Nth process cycle (where N is a natural number) in the available process chambers in a first transporting order, wherein a process cycle is defined as an operation in which a semiconductor substrate is inserted from the load port into a process chamber via the robot arm to perform a semiconductor process and then returned to the load port after the semiconductor process, and
• the control server provides operating information, based on which the unusable process chambers are identified as available process chambers and the robot arm performs an N+1th process cycle in a second transporting order, at a first time when a restriction on at least one of the unusable process chambers is lifted.