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US 2022/0068626 A1Published application
Excimer lamp and light irradiation device
AssigneeUshio Denki Kabushiki Kaisha
InventorHideaki YAGYU
Life of this patent
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Abstract
An excimer lamp is such that that an interior of a discharge vessel is filled with a first gas including krypton (Kr) or xenon (Xe); a second gas including chlorine (Cl) or bromine (Br); and a third gas which is at least one species selected from among the group consisting of argon (Ar), neon (Ne), and helium (He), and which exhibits a partial pressure Pb that is not less than a partial pressure Plg of the first gas.
Claims9
An excimer lamp characterized in that an interior of a discharge vessel is filled with
- a first gas comprising krypton (Kr) or xenon (Xe);
- a second gas comprising chlorine (Cl) or bromine (Br);
- and
- a third gas which is at least one species selected from among the group consisting of argon (Ar), neon (Ne), and helium (He), a partial pressure Pb of the third gas being not less than a partial pressure Plg of the first gas, and Pb/Plg≤18.0 is satisfied.
1 more element
(canceled)
Dependencies are inferred from the claim text.