Systems and methods for a magnetron with a segmented target configuration

A magnetron system, comprising:

• a baseplate assembly defining a housing portion and a power feedthrough;
• a segmented target assembly disposed within the housing portion, the segmented target assembly having an inner target segment having a plurality of target tiles and an outer target segment having a plurality of target tiles, wherein a first subset of the plurality of target tiles having a first material and wherein a second subset of the plurality of target tiles having a second material, wherein the plurality of target tiles are arranged in an alternating order such that a target tile of the plurality of target tiles having the first material is juxtapositioned between two target tiles of the plurality of target tiles having the second material, and a target tile of the plurality of target tiles having the second material is juxtapositioned between two target tiles of the plurality of target tiles having the first material;
• and
• a magnet assembly disposed within the housing portion.