Wafer support and equipment for thin-film deposition or pre-cleaning using the same

An equipment for thin-film deposition or pre-cleaning, comprising:

• a chamber comprising a containing space;
• a gas-extraction device;
• at least one gas-extraction end fluidly connected to the gas-extraction device and the containing space of the chamber;
• at least one gas-inlet end fluidly connected to the containing space of the chamber for transferring a gas to the containing space;
• a support pedestal positioned within the containing space, wherein the support pedestal comprises a supporting surface for supporting at least one wafer, the support pedestal is electrically connected to a bias power source to form a bias on the support pedestal;
• at least one fixing ring positioned above the support pedestal or positioned to surround the support pedestal and the wafer, wherein the at least one fixing ring has an upper surface at a height level higher than the supporting surface of the support pedestal, with a height difference between the upper surface of the at least one fixing ring and the supporting surface of the support pedestal less than 4 millimeter (mm);
• and
• a plurality of fixing members connected to the upper surface of the at least one fixing ring, wherein the fixing members contacts a surface of the wafer and fix the wafer on the support pedestal.

A wafer support, comprising:

• a support pedestal comprising a supporting surface for supporting at least one wafer, wherein the support pedestal is electrically connected to a bias power source to form a bias on the support pedestal;
• at least one fixing ring positioned above the support pedestal or positioned to surround the support pedestal and the wafer, wherein the at least one fixing ring has an upper surface that is at a height level same as or lower than the supporting surface of the support pedestal is;
• and
• a plurality of fixing members connected to the upper surface of the at least one fixing ring, wherein the fixing members contacts a surface of the wafer and fix the wafer on the support pedestal.