Plasma Strip Tool With Movable Insert
AssigneesBeijing E-Town Semiconductor Technology Co., Ltd., Mattson Technology, Inc.
InventorsMaolin Long, Qiqun Zhang
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Abstract
Plasma processing apparatus for processing a workpiece are provided. In one example embodiment, a plasma processing apparatus for processing a workpiece includes a processing chamber, a plasma chamber separated from the processing, and an inductively coupled plasma source configured to generate a plasma in the plasma chamber. The apparatus includes a pedestal disposed within the processing chamber configured to support a workpiece. The apparatus includes an insert disposed in the plasma chamber movable to one or more vertical positions within the plasma chamber. Methods for processing of workpieces are also provided.
Claims20
A plasma processing apparatus for processing a workpiece, the plasma processing apparatus comprising:
- a processing chamber;
- a plasma chamber separated from the processing chamber;
- an inductively coupled plasma source configured to generate a plasma in the plasma chamber;
- a pedestal disposed within the processing chamber, the pedestal configured to support a workpiece;
- and
- an insert disposed in the plasma chamber, the insert movable to one or more vertical positions within the plasma chamber.
A method for processing a workpiece in a plasma processing apparatus, the plasma processing apparatus having a plasma chamber and a processing chamber, the processing chamber having a workpiece support, the processing chamber having an insert disposed therein movable to one or more vertical positions within the plasma chamber, the method comprising:
- admitting a process gas to the plasma chamber;
- generating one or more species from the process gas using a plasma induced in a plasma chamber;
- moving the insert from a first vertical position to a second vertical position within the plasma chamber;
- filtering the one or more species to generate a filtered mixture;
- and
- exposing the workpiece to the filtered mixture to process the workpiece.
Dependencies are inferred from the claim text.