Failure analysis system of semiconductor device, failure analysis method of semiconductor device, and non-transitory computer readable medium

A failure analysis method of a semiconductor device, the failure analysis method comprising:

• storing, in a memory, normal/failure information collected in a block unit and a column unit in a chip, in a plurality of inspection processes of the semiconductor memory;
• creating a failure information management table configured to store the normal/failure information in the block unit and the column unit stored in the memory, with an addition of product information, fabricating information including a lot number, a wafer number, and a chip address, process information, and test information, which are common information ranging over the inspection processes;
• and
• analyzing, by an analyzing unit, the normal/failure information in the block unit and the column unit ranging over the plurality of inspection processes, on the basis of the information stored in the failure information management table.

A non-transitory computer readable medium in which a computer program is stored, the computer program being executed by a computer used for a failure analysis system of a semiconductor device, the computer program comprising:

• storing, in a memory, normal/failure information collected in a block unit and a column unit in a chip, in a plurality of inspection processes of the semiconductor memory;
• creating a failure information management table configured to store the normal/failure information in the block unit and the column unit stored in the memory, with an addition of product information, fabricating information including a lot number, a wafer number, and a chip address, process information, and test information, which are common information ranging over the inspection processes;
• and
• analyzing, by an analyzing unit, the normal/failure information in the block unit and the column unit ranging over the plurality of inspection processes, on the basis of the information stored in the failure information management table.