Semiconductor manufacturing system, control device, and control method

A control device that controls a semiconductor manufacturing apparatus based on an operation received from a user by a local operation terminal that displays an apparatus screen of the semiconductor manufacturing apparatus and at least one remote operation terminal that displays the apparatus screen, the control device comprising:

• login state managing circuitry that manage a simultaneous login state from the local operation terminal and the remote operation terminal;
• apparatus screen display state managing circuitry that manage an apparatus screen display state of the local operation terminal and the remote operation terminal that are logged in;
• and
• screen data creating circuitry that create screen data of the apparatus screen sent to the local operation terminal and the remote operation terminal that are logged in, for each of the local operation terminal and the remote operation terminal, based on the simultaneous login state and the apparatus screen display state.

A control method that controls a semiconductor manufacturing apparatus based on an operation received from a user by a local operation terminal that displays an apparatus screen of the semiconductor manufacturing apparatus and at least one remote operation terminal that displays the apparatus screen, the control method comprising:

• managing a simultaneous login state from the local operation terminal and the remote operation terminal;
• managing an apparatus screen display state for each of the local operation terminal and the remote operation terminal that are logged in;
• and
• creating screen data of the apparatus screen sent to the local operation terminal and the remote operation terminal that are logged in for each of the local operation terminal and the remote operation terminal based on the simultaneous login state and the apparatus screen display state.

A non-transitory computer-readable recording medium having stored therein a program that causes a controller that controls a semiconductor manufacturing apparatus based on an operation received from a user by a local operation terminal that displays an apparatus screen of the semiconductor manufacturing apparatus and at least one remote operation terminals that display the apparatus screen to function as:

• login state managing circuitry that manage a simultaneous login state from the local operation terminal and the remote operation terminal;
• apparatus screen display state managing circuitry that manage an apparatus screen display state of the local operation terminal and the remote operation terminal that are logged in;
• and
• screen data creating circuitry that create screen data of the apparatus screen sent to the local operation terminal and the remote operation terminal that are logged in, for each of the local operation terminal and the remote operation terminal, based on the simultaneous login state and the apparatus screen display state.