Reticle Constructions and Photo-Processing Methods

A photo-processing method, comprising:

• forming photoimageable material over a substrate;
• forming a reticle configured to pattern first and second target features within the photoimageable material;
• the reticle having first pattern features which pattern the first target features and having second pattern features which pattern the second target features;
• the second pattern features being larger than the first pattern features;
• each of the second pattern features including a central region and an outer region laterally surrounding the central region, with the central region being of different opacity than the outer region;
• the central regions being of a suitable configuration so that an optimum dose of actinic radiation through the second pattern features is within about 5% of an optimum dose of the actinic radiation through the first pattern features;
• the suitable configuration of the central regions of the second pattern features being determined by 1) determining the optimum dose of actinic radiation for the first pattern features, 2) determining a relationship between the configuration of the central regions of the second pattern features to the optimum dose of the actinic radiation for the second pattern features, and 3) utilizing the relationship to ascertain the suitable configuration of the central regions of the second pattern features;
• and
• passing the actinic radiation through the reticle and onto the photoimageable material to pattern the first and second target features within the photoimageable material.

A reticle, comprising:

• first pattern features having a first optimal dose of actinic radiation associated therewith;
• second pattern features having a second optimal dose of the actinic radiation associated therewith;
• the second pattern features being larger than the first pattern features;
• each of the second pattern features having a configuration which includes a central region laterally surrounded by an outer region, with the central region being of different opacity than the outer region;
• and
• the configurations of the second pattern features balancing the second optimal dose of the actinic radiation to be within about 5% of the first optimal dose of the actinic radiation.