Protection of optical materials of optical components from radiation degradation
AssigneesKLA Corporation, Carl Zeiss SMT GmbH
InventorsEvgeniia Butaeva, Gildardo Delgado, Grace Chen, John Savee, Matthew Derstine, Vera (Guorong) Zhuang, Gary V. Lopez Lopez
Life of this patent
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Abstract
An optical system includes a bulk material including a fluorine (F)-containing optical material. The bulk material is exposed to an environment at a pressure ranging from atmospheric to vacuum when the bulk material is under extreme ultra-violet (EUV), vacuum ultra-violet (VUV), deep ultra-violet (DUV) and/or UV radiation. The environment includes at least one type of gas or vapor. The at least one type of gas or vapor includes polar molecules.
Claims20
An optical system comprising:
- a bulk material including a fluorine (F)-containing optical material, wherein the bulk material is exposed to an environment at a pressure ranging from atmospheric to vacuum when the bulk material is under extreme ultra-violet (EUV), vacuum ultra-violet (VUV), deep ultra-violet (DUV) and/or UV radiation, the environment including at least one type of gas or vapor, the at least one type of gas or vapor including polar molecules.
An optical system comprising:
- a bulk material including a fluorine (F)-containing optical material, wherein the bulk material is exposed to an environment at a pressure ranging from atmospheric to vacuum when the bulk material is under extreme ultra-violet (EUV), vacuum ultra-violet (VUV), deep ultra-violet (DUV) and/or UV radiation, the environment including at least one type of gas or vapor, the at least one type of gas or vapor including polar molecules;
- and
- a coating layer disposed on the bulk material.
An optical material comprising:
- a bulk material including a fluorine (F)-containing optical material, wherein the F-containing optical material is selected from the group consisting of magnesium fluoride (MgF2), calcium fluoride (CaF2), lanthanum trifluoride (LaF3), strontium fluoride (SrF2), barium fluoride (BaF2), lithium fluoride (LiF), and a combination thereof;
- and
- a coating layer including a coating material disposed on the bulk material, wherein the coating material has a reflectivity of at least 20%.
Dependencies are inferred from the claim text.