Laser Interferometer and Control Method for Laser Interferometer
AssigneeSeiko Epson Corporation
InventorKohei YAMADA
Life of this patent
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Abstract
A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and a demodulation circuit that performs a demodulation process for demodulating the sample signal from the light reception signal, and the demodulation circuit intermittently performs the demodulation process.
Claims17
A laser interferometer comprising:
- a light source that emits first laser light;
- an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal;
- a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal;
- and
- a demodulation circuit that performs a demodulation process for demodulating the sample signal from the light reception signal, wherein
- the demodulation circuit intermittently performs the demodulation process.
A control method for a laser interferometer including
- a light source that emits first laser light,
- an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, and
- a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, the control method comprising:
- intermittently performing a demodulation process for demodulating the sample signal from the light reception signal.
Dependencies are inferred from the claim text.