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US 2022/0065727 A1Published application
Coolant Microleak Sensor for a Vacuum System
AssigneeKLA Corporation
InventorsNadir S. Faradzhev, Michael Sushchikh, Salam Harb
Life of this patent
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Abstract
A system includes a vacuum chamber and a component, disposed in the vacuum chamber, that heats up during operation. The system also includes a cooling line, mechanically coupled to the component, to circulate coolant to cool the component during operation. The system further includes a vacuum gauge to measure a total pressure in the vacuum chamber and an analyzer to measure a partial pressure in the vacuum chamber of a substance that can leak from the cooling line.
Claims28
A system, comprising:
- a vacuum chamber;
- a component, disposed in the vacuum chamber, that heats up during operation;
- a cooling line, mechanically coupled to the component, to circulate coolant to cool the component during operation;
- a vacuum gauge to measure a total pressure in the vacuum chamber;
- and
- an analyzer to measure a partial pressure in the vacuum chamber of a substance that can leak from the cooling line.
3 more elements
A method, comprising:
- operating a component disposed in a vacuum chamber, wherein operating the component causes heating;
- circulating coolant through a cooling line mechanically coupled to the component, to cool the component;
- measuring a total pressure in the vacuum chamber;
- measuring a partial pressure in the vacuum chamber of a substance that can leak from the cooling line;
- and
- based on the partial pressure, determining whether the cooling line has a leak.
3 more elements
Dependencies are inferred from the claim text.