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US 2022/0065722 A1Published application
Pressure sensor
AssigneeJapan Display Inc.
InventorsTakumi SANO, Shinichiro OKA
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Abstract
According to one embodiment, a pressure sensor includes an insulating base material, an switching element disposed on the insulating base material, a piezoelectric layer disposed on the insulating base material and the switching element and an underlying layer located between the piezoelectric layer and the insulating base material, and the modulus of elasticity of the underlying layer is greater than the modulus of elasticity of the piezoelectric layer.
Claims9
An pressure sensor comprising:
- an insulating base material;
- an switching element disposed on the insulating base material;
- a piezoelectric layer disposed on the insulating base material and the switching element;
- and
- an underlying layer located between the piezoelectric layer and the insulating base material, wherein
- a modulus of elasticity of the underlying layer is greater than a modulus of elasticity of the piezoelectric layer.
3 more elements
Dependencies are inferred from the claim text.