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AssigneeEzmems Ltd.
InventorsTsvi SHMILOVICH, Nicola MOLINAZZI
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A sensor device, and methods of manufacture thereof, are disclosed. The sensor device comprising a deformable substrate and a plurality of sensing elements formed on the deformable substrate, each of the plurality of sensing elements comprises at least one of a plurality of strain sensitive lines radially extending with respect to a center of the deformable substrate and a plurality of arched-shaped strain sensitive lines extending with respect to the center of the deformable substrate. The plurality of sensing elements are arranged on the deformable substrate such that strain components measured due to extension of strain sensitive lines of at least one of the sensing elements are of opposite strain direction with respect to strain components measured due to compression of strain sensitive lines of at least one other of the sensing elements, thereby maximizing performance and measurement range.
A sensor device comprising deformable substrate and a plurality of sensing elements formed on said deformable substrate, each of said plurality of sensing elements comprises at least one of a plurality of strain sensitive lines radially extending with respect to a center of the deformable substrate and a plurality of shaped strain sensitive lines extending with respect to the center of the deformable substrate, said plurality of sensing elements are arranged on said deformable substrate such that strain components measured due to extension of strain sensitive lines of at least one of said sensing elements are of opposite strain direction with respect to strain components measured due to compression of strain sensitive lines of at least one other of said sensing elements, thereby maximizing performance and measurement range.
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A method of making a sensor device comprising patterning at least one piezoresistive layer on at least one side of a deformable substrate to form at least one sensing element having a plurality of strain sensitive lines radially extending with respect to a center of said deformable substrate or a plurality of shaped strain sensitive lines extending about said center of the deformable substrate, patterning at least one electrically conducting layer at least partially on said at least one piezoresistive layer and on said at least one side of the deformable substrate for establishing electrical contact with said at least one sensing element, and applying at least one coating layer to partially, or entirely, cover said piezoresistive and electrically conducting layers.
Dependencies are inferred from the claim text.