Laser interferometer
AssigneeSeiko Epson Corporation
InventorJun KITAGAWA
Life of this patent
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Abstract
A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and an optical path length variable section that changes an optical path length of an optical path through which the third laser light propagates.
Claims14
A laser interferometer comprising:
- a light source that emits first laser light;
- an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal;
- a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal;
- and
- an optical path length variable section that changes an optical path length of an optical path through which the third laser light propagates.
A laser interferometer comprising:
- a light source that emits first laser light;
- an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal;
- a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal;
- and
- an optical path length variable section that changes an optical path length of an optical path through which the second laser light propagates.
Dependencies are inferred from the claim text.