Laser Interferometer

Abstract

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and a signal generator that outputs the reference signal input to the demodulation circuit and outputs a drive signal input to the optical modulator, in which Vd/Vr<10, where Vr is a voltage of the reference signal and Vd is a voltage of the drive signal.

Dependencies are inferred from the claim text.