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US 2022/0065253 A1Published application
Device
AssigneeSeiko Epson Corporation
InventorShuichi Iguchi
Life of this patent
Estimating the term…
Abstract
A vacuum pump includes a pump rotor, a housing configured to house the pump rotor, and a monitoring device attached to the housing and configured to detect vibration of the housing. The housing includes first channels for causing a coolant to flow to a portion opposed to the monitoring device.
Claims7
A device comprising:
- a movable body;
- a housing configured to house the movable body;
- and
- a monitoring device attached to the housing and configured to detect vibration of the housing, wherein
- the housing includes first channels for causing a coolant to flow to overlap the monitoring device in a plan view from a direction perpendicular to an attachment surface for the monitoring device.
2 more elements
Dependencies are inferred from the claim text.