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US 2022/0064575 A1Published application
Cleaning Compositions
AssigneeFujifilm Electronic Materials U.S.A., Inc.
InventorsEmil A. Kneer, Thomas Dory, Atsushi Mizutani
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Abstract
This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one chelating agent, the chelating agent being a polyaminopolycarboxylic acid; 3) at least one corrosion inhibitor, the corrosion inhibitor being a substituted or unsubstituted benzotriazole; 4) at least one sulfonic acid; and 5) water.
Claims41
A cleaning composition, comprising:
- 1) at least one redox agent;
- 2) at least one chelating agent, the chelating agent being a polyaminopolycarboxylic acid;
- 3) at least one corrosion inhibitor, the corrosion inhibitor being a substituted or unsubstituted benzotriazole;
- 4) at least one sulfonic acid;
- and
- 5) water.
3 more elements
Dependencies are inferred from the claim text.