Back to results
US 2022/0064009 A1Published application
Chlorosilane Manufacturing Method
AssigneeTokuyama Corporation
InventorsKatsuya Ogihara, Shoji Iiyama, Kunihiko Matsumura
Life of this patent
Estimating the term…
Abstract
When producing chlorosilanes by a reaction between metallic silicon and hydrogen chloride, as the above metallic silicon, a metallic silicon powder having an oil adhering amount of 5 ppmw or less is subjected to the reaction as the metallic silicon.
Claims6
A method for producing chlorosilanes, comprising:
- using, as metallic silicon, a metallic silicon powder having an oil adhering amount of 5 ppmw or less when producing chlorosilanes by a reaction between the metallic silicon and hydrogen chloride.
A metallic silicon powder, wherein an oil adhering amount is 5 ppmw or less.
A method for producing chlorosilanes, comprising:
- reacting a metallic silicon and hydrogen chloride to produce a chlorosilane,
- wherein the metallic silicon comprises a metallic silicon powder having an oil adhering amount of 5 ppmw or less.
Dependencies are inferred from the claim text.