Substrate treating apparatus
AssigneeSemes Co., Ltd.
InventorsJI HOON JEONG, WON-GEUN KIM, YOUNG DAE CHUNG, TAE SHIN KIM, JEE YOUNG LEE
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Abstract
The present disclosure provides a substrate treating apparatus. The substrate treating apparatus includes a support unit that supports a substrate, and a laser unit that irradiates a laser beam to the substrate supported by the support unit, the laser unit includes an irradiation member that irradiates the laser beam, a lens disposed on a travel path of the laser beam irradiated by the irradiation member to be rotatable, and a reflection member having an inclined surface for changing the travel path of the laser beam that passed through the lens.
Claims20
A substrate treating apparatus comprising:
- a support unit configured to support a substrate;
- and
- a laser unit configured to irradiate a laser beam to the substrate supported by the support unit,
- wherein the laser unit includes:
- an irradiation member configured to irradiate the laser beam;
- a lens disposed on a travel path of the laser beam irradiated by the irradiation member to be rotatable;
- and
- a reflection member having an inclined surface for changing the travel path of the laser beam that passed through the lens.
A substrate treating apparatus comprising:
- a support unit that supports a substrate;
- a treatment liquid nozzle configured to supply a treatment liquid to the substrate supported by the support unit;
- and
- a laser unit configured to irradiate a laser beam to an upper surface of the substrate supported by the support unit, and
- wherein the laser unit includes:
- an irradiation member configured to irradiate the laser beam;
- a cylindrical lens configured to rotate the laser beam;
- and
- a reflection member configured to reflect the laser beam that passed through the cylindrical lens in a direction that faces the upper surface of the substrate supported by the support unit.
A substrate treating apparatus comprising:
- a support unit that supports a substrate;
- and
- a laser unit configured to irradiate a laser beam in a p-polarization state to the substrate supported by the support unit,
- wherein the laser unit includes:
- an irradiation member configured to irradiate the laser beam in the p-polarization state;
- a pair of cylindrical lenses disposed on a travel path of the laser beam in the p-polarization state irradiated by the irradiation member, provided to be rotatable, having a shape, one surface of which has a planar surface that is flat and an opposite surface of which has a curved surface;
- and
- a reflection member having a conical shape, an upper end of which is truncated, coupled to any one of the pair of cylindrical lenses, and having an inclined surface that reflects the laser beam in the p-polarization state that passed through the cylindrical lenses.
Dependencies are inferred from the claim text.