Chemical liquid application apparatus and viscosity adjustment bottle
AssigneeKioxia Corporation
InventorTakanori FUKUSUMI
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AssigneeKioxia Corporation
InventorTakanori FUKUSUMI
Estimating the term…
A chemical liquid application apparatus according to one embodiment includes: a processing unit which applies a chemical liquid to a substrate; and a viscosity adjustment unit including a viscosity adjustment bottle which mixes a chemical liquid and a diluent. The viscosity adjustment bottle includes a first introduction port into which the chemical liquid is introduced, a second introduction port into which the diluent diluting the chemical liquid is introduced, a porous body which is connected to the first and second introduction ports and includes a plurality of holes through which the chemical liquid and the diluent introduced from the first and second introduction ports flow, and a discharge port which is connected to the porous body and from which the mixture of the chemical liquid and the diluent is discharged.
A chemical liquid application apparatus comprising:
A chemical liquid application apparatus comprising:
A viscosity adjustment bottle that is attachable to a chemical liquid application apparatus applying a chemical liquid to a substrate, the viscosity adjustment bottle comprising:
Dependencies are inferred from the claim text.