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US 2022/0054988 A1Published application
Chemical precursor bubbler assembly with routing structure
OwnerWilliam L. Kimmerleinventor
Life of this patent
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Abstract
A bubbler apparatus may include a container, a lid, a sealing member and at least one routing member. As the lid is tightened to the container and the sealing member is compressed, the routing member(s) does not contact the inside bottom surface of the container. Instead, there is a small gap between the routing member and the bottom surface of the container. The routing member may compress the substance in the container that the gas is saturated with or may slice through the substance.
Claims20
A method for a bubbler apparatus comprising the steps of:
- A) providing a bubbler apparatus including:
- 1) a container having:
- a) a top and a bottom defining an inside bottom surface;
- and b) a height H1 from the top to the inside bottom surface;
- 2) a lid;
- 3) a sealing member;
- 4) an inlet opening;
- 5) an outlet opening;
- and
- 6) a gas routing structure including a first routing member;
- B) providing the bubbler apparatus to be operable to perform the following steps:
- 1) placing a substance within the container;
- 2) placing the first routing member within the container;
- 3) placing the sealing member on the top of the container;
- 4) placing the lid on the sealing member;
- 5) tightening the lid to the sealing member thereby compressing the sealing member;
- 6) providing the first routing member with a vertical height H2 within the container between the top of the container and a distal end of the first routing member;
- 7) providing H2 to be less than H1 thereby forming a gap between the distal end of the first routing member and the inside bottom surface of the container that is between 0.10 inches and 0.01 inches;
- and
- 8) moving a gas stream:
- into the container through the inlet opening;
- into contact with the substance to saturate the gas with the substance;
- into contact with the first routing member to rout the gas within the container;
- and out of the container through the outlet opening;
- wherein:
- step B6 occurs after step B5.
23 more elements
A bubbler apparatus comprising:
- a container having:
- 1) a top and a bottom defining an inside bottom surface;
- and 2) a height H1 from the top to the inside bottom surface;
- a lid;
- a sealing member;
- an inlet opening;
- an outlet opening;
- and
- gas routing structure including a first routing member;
- and
- wherein the bubbler apparatus is operable to:
- 1) place a substance within the container;
- 2) place the first routing member within the container;
- 3) place the sealing member on the top of the container;
- 4) place the lid on the sealing member;
- 5) tighten the lid to the sealing member thereby compressing the sealing member;
- 6) provide the first routing member with a vertical height H2 within the container between the top of the container and a distal end of the first routing member after the lid has been tightened;
- 7) provide H2 to be less than H1 thereby forming a gap between the distal end of the first routing member and the inside bottom surface of the container that is between 0.10 inches and 0.01 inches;
- and
- 8) move a gas stream:
- into the container through the inlet opening;
- into contact with the substance to saturate the gas with the substance;
- into contact with the first routing member to rout the gas within the container;
- and out of the container through the outlet opening.
21 more elements
A method of operating a bubbler apparatus comprising the steps of:
- A) providing a bubbler apparatus including:
- 1) a container having:
- a) a top and a bottom defining an inside bottom surface;
- and b) a height H1 from the top to the inside bottom surface;
- 2) a lid;
- 3) a sealing member;
- 4) an inlet opening;
- 5) an outlet opening;
- and
- 6) a gas routing structure including a first routing member;
- B) placing a substance within the container;
- C) placing the first routing member within the container;
- D) placing the sealing member on the top of the container;
- E) placing the lid on the sealing member;
- F) tightening the lid to the sealing member thereby compressing the sealing member;
- G) providing the first routing member with a vertical height H2 within the container between the top of the container and a distal end of the first routing member;
- H) providing H2 to be less than H1 thereby forming a gap between the distal end of the first routing member and the inside bottom surface of the container that is between 0.10 inches and 0.01 inches;
- and
- I) moving a gas stream:
- into the container through the inlet opening;
- into contact with the substance to saturate the gas with the substance;
- into contact with the first routing member to rout the gas within the container;
- and out of the container through the outlet opening;
- wherein step G occurs after step F.
21 more elements
Dependencies are inferred from the claim text.