Defect inspection apparatus and defect inspection method

A defect inspection apparatus comprising:

• an excitation unit configured to excite acoustic wave vibration in an inspection target;
• a laser illumination unit configured to irradiate the inspection target with laser light;
• an interference unit configured to cause reflected light of the laser light arriving from mutually different positions of the inspection target excited by the excitation unit to interfere;
• an imaging unit configured to image the interfered reflected light;
• and
• a control unit configured to measure, based on the interfered reflected light imaged by the imaging unit, a periodically varying spatial distribution of physical quantities caused by propagation of vibration of the inspection target and extract, based on the spatial distribution of the physical quantities, a vibration discontinuous portion,
• wherein the control unit is configured to perform control of displaying the extracted vibration discontinuous portion so as to be emphasized and superimposed on a still image of the inspection target captured by the imaging unit, and
• wherein the control unit is configured to perform control of displaying the physical quantities periodically varying at the extracted vibration discontinuous portion as a moving image so as to be emphasized and superimposed on the still image.