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US 2022/0050125 A1Published application
Probe production method and surface observation method
AssigneeShowa Denko K.K.
InventorsTsuyoshi KATO, Hiroyuki TOMITA, Takuya MINAMI, Shohei NISHIZAWA, Yoshitomo SHIMAZU, Gohei KUROKAWA, Katsumi MUROFUSHI, Naoya FUKUMOTO
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Abstract
This probe production method is a method of producing a probe (101) having a coating layer (104) on a surface thereof, in which the coating layer (104) is formed on a surface of a base material (103) having a sharp tip end portion (103a) using a gas phase method.
Claims12
A method of producing a probe having a coating layer on a surface thereof, comprising:
- forming the coating layer on a surface of a base material having a sharp tip end portion using a gas phase method.
Dependencies are inferred from the claim text.