# US 2022/0045347 A1 · Method of manufacturing of a membrane with surface fibre structure, membrane manufactured by this method and use of such membrane > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2022/0045347 A1 - Document ID: US20220045347A1 - Status: Published application - Kind: A1 - Application number: 17/278,892 - Filed: 2019-09-27 - Published: 2022-02-10 - Earliest claimed: 2018-09-30 - Assignees: Univerzita Karlova - Applicants: Univerzita Karlova - Inventors: Peter KUS; Yurii YAKOVLEV; Vladimir MATOLIN - Web page: https://patentgrep.com/patent/US20220045347A1 ## CPC - H01M 8/1086: After-treatment of the membrane other than by polymerisation - C23C 14/35: by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} - C25B 13/02: characterised by shape or form - C25B 13/04: characterised by the material - H01M 4/8871: {Sputtering} - H01M 8/1004: characterised by membrane-electrode assemblies [MEA] (H01M8/12 takes precedence) - H01M 2008/1095: {Fuel cells with polymeric electrolytes} - H01M 2300/0082: Organic polymers - Y02E 60/36: Hydrogen production from non-carbon containing sources, e.g. by water electrolysis - Y02E 60/50: Fuel cells - Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product - H01M: PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - C25B: ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR (anodic or cathodic protection C23F13/00; single-crystal growth C30B) - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION - Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS ## Abstract Method of manufacturing of a membrane with surface fiber structure, in particular for use in an electrolyzer or fuel cell, by inserting the polymer membrane into the vacuum chamber equipped with a magnetron sputtering system with a cerium oxide target in which an atmosphere of O2 and inert gas is formed and igniting the plasma which leads to simultaneous plasma etching of the membrane surface and deposition of cerium oxide onto the surface of etched membrane resulting in formation of fibers. The membrane is made of polymer and on at least one of its sides features porous surface made of fibers, the cross-sectional dimensions of which are lower than their length and which are integral and inseparable part of membrane body. ## Claims ### Claim 1 A method of manufacturing a membrane with surface fiber structure, the method comprising: inserting the membrane into a vacuum chamber having a magnetron sputtering system with a cerium oxide target, the sputtering system having an atmosphere of inert gas and O2 as a reactive gas; and igniting plasma as an ionized atmosphere to provide plasma etching of a surface of the membrane and deposition of cerium oxide on the etched surface of the membrane resulting in formation of fibers. ### Claim 2 (depends on 1) The method of claim 1, wherein a cerium oxide film with thickness equal or lower than 10 nm is deposited on the etched surface of the membrane. ### Claim 3 (depends on 1) The method of claim 1, wherein a layer of catalyst includes magnetron sputtered onto the surface of the membrane. ### Claim 4 (depends on 3) The method of claim 3, wherein the layer of catalyst includes a loading lower than 1 mg·cm−2. ### Claim 5 (depends on 3) The method of claim 3, wherein a single- or multi-elemental noble metal-based catalyst is deposited on the surface of the membrane. ### Claim 6 (depends on 1) The method of claim 1, wherein the membrane is made of polymer and on at least one of its sides features a porous surface made of fibers, the porous surface having cross-sectional dimensions lower than their length and the porous surface being an integral and inseparable part of the membrane. ### Claim 7 (depends on 6) The method of claim 6, wherein the polymer includes an ionomer material. ### Claim 8 (canceled) ### Claim 9 (canceled) ### Claim 10 (depends on 1) The method of claim 1, wherein spacing between the fibers is equal or lower than an average length of the fibers. ### Claim 11 (depends on 1) The method of claim 1, wherein the membrane is configured for use in a water electrolyzer. ### Claim 12 (depends on 1) The method of claim 1, wherein the membrane is configured for use in a fuel cell. ### Claim 13 An apparatus, comprising: a membrane having a surface fiber structure, the membrane formed by: inserting the membrane into a vacuum chamber having a magnetron sputtering system with a cerium oxide target, the sputtering system having an atmosphere of inert gas and O2 as a reactive gas; and igniting plasma as an ionized atmosphere to provide plasma etching of a surface of the membrane and deposition of cerium oxide on the etched surface of the membrane resulting in formation of fibers. ### Claim 14 (depends on 13) The apparatus of claim 13, wherein the membrane includes a polymer membrane. ### Claim 15 (depends on 13) The apparatus of claim 13, wherein a cerium oxide film with thickness equal or lower than 10 nm is deposited on the etched surface of the membrane. ### Claim 16 (depends on 13) The apparatus of claim 13, wherein a layer of catalyst includes magnetron sputtered onto the surface of the membrane. ### Claim 17 (depends on 16) The apparatus of claim 16, wherein the layer of catalyst includes a loading lower than 1 mg·cm−2. ### Claim 18 (depends on 16) The apparatus of claim 16, wherein a single- or multi-elemental noble metal-based catalyst is deposited onto the surface of the membrane. ### Claim 19 (depends on 14) The apparatus of claim 14, wherein the polymer membrane includes an ionomer material. ### Claim 20 (depends on 13) The apparatus of claim 13, wherein spacing between the fibers is less than or equal to an average length of the fibers. ### Claim 21 (depends on 13) The apparatus of claim 13, wherein the membrane is configured for use in a water electrolyzer. ### Claim 22 (depends on 13) The apparatus of claim 13, wherein the membrane is configured for use in a fuel cell.