# US 2022/0045267 A1 · Magnetoresistive element having a sidewall-current-channel structure > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2022/0045267 A1 - Document ID: US20220045267A1 - Status: Published application - Kind: A1 - Application number: 17/492,645 - Filed: 2021-10-03 - Published: 2022-02-10 - Earliest claimed: 2021-10-03 - Inventors: YIMIN GUO; Rongfu Xiao; Jun Chen - Web page: https://patentgrep.com/patent/US20220045267A1 ## CPC - H10N 50/10: Magnetoresistive devices - H10N 50/80: Constructional details - H10B 61/00: Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices - H10N 50/01: Manufacture or treatment - H10N 50/85: Materials of the active region - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - H10B: ELECTRONIC MEMORY DEVICES ## Abstract A magnetoresistive element comprises a nonmagnetic sidewall-current-channel (SCC) structure provided on a surface of the magnetic recording layer, which is opposite to a surface of the magnetic recording layer where the tunnel barrier layer is provided, and comprising an insulating medium in a central region of the SCC structure, and a conductive medium being a sidewall of the SCC structure and surrounding the insulating medium, making an electric current crowding inside the magnetic recording layer to achieve a higher spin-polarization degree for an applied electric current. ## Claims ### Claim 1 A magnetoresistive element comprising: a magnetic reference layer having a perpendicular magnetic anisotropy and having an invariable magnetization direction; a tunnel barrier layer provided on the magnetic reference layer; a magnetic recording layer provided on the tunnel barrier layer and having a perpendicular magnetic anisotropy and a variable magnetization direction; a sidewall-current-channel (SCC) structure provided on the magnetic recording layer, wherein the SCC structure comprises an insulating medium in a central region of the SCC structure, and a conductive medium being a vertical sidewall of the SCC structure and surrounding the insulating medium; a protective cap layer provided on the insulating medium; and a hard mask layer provided on the protective cap layer; wherein the tunnel barrier layer has a first resistance-area product (RA1), the insulating medium comprises an insulating oxide or nitride material and has a second resistance-area product (RA2), the second resistance-area product (RA2) is higher than the first resistance-area product (RA1), the conductive medium comprises a conductive material making electrical connection between the magnetic recording layer and the protective cap layer. ### Claim 2 (depends on 1) The element of claim 1, wherein said conductive medium further extends along a vertical direction to be vertical sidewalls of said protective cap layer and said hard mask layer, and surrounds said protective cap layer and said hard mask layer. ### Claim 3 (depends on 1) The element of claim 1, wherein said conductive medium comprises at least one layer of metal or metal alloy or conductive metal nitride material, preferred to be Ru, Mo, W, Ta, Ti, Cr, V, Hf, Nb, Zr, Fe, Co, Ni, Cu, Pt, Au, Ag, Rh, Ir, Os, Re, or alloy thereof, or nitride thereof. ### Claim 4 (depends on 1) The element of claim 1, wherein said conductive medium has a wall thickness between 1.5 nm and 5.0 nm, and has substantially the same outer diameter as said magnetic recording layer. ### Claim 5 (depends on 1) The element of claim 1, wherein said insulating medium comprises at least one layer of oxide or nitride, preferred to be selected from the group consisting of MgO, MgAl2O4, Al2O3, HfO2, ZrO2, TiO2, SiO2, Y2O3, RuO, OsO, TcO, ReO, BeO, SiN, RuN, OsN, TcN, ReN, NiO, CoO, FeO, FeCoO2, NiFeO2, CoNiO2, MnO, CrO, VO, TiO, ZnO and CdO. ### Claim 6 (depends on 1) The element of claim 1, wherein said second resistance-area product (RA2) is at least 5 times said first resistance-area product (RA1). ### Claim 7 (depends on 1) The element of claim 1, wherein said insulating medium has a thickness of at least 12 angstroms. ### Claim 8 (depends on 1) The element of claim 1, wherein said magnetic recording layer has an in-plane sheet resistance Rs, and a current-crowding characteristic length being the square-root of the ratio between said first resistance-area product (RA1) and said in-plane sheet resistance Rs, said current-crowding characteristic length being larger than the outer diameter of said insulating medium. ### Claim 9 (depends on 1) The element of claim 1, further comprising a perpendicular anisotropy enhancement layer between said magnetic recording layer and said SCC structure, wherein said perpendicular anisotropy enhancement layer comprises at least one layer of Ru, Mg, Mo, W, Ta, Ti, Cr, V, Hf, Nb, Zr, Fe, Co, Ni, Al, Cu, Pt, Au, Ag, Rh, Ir, Os, Re, or alloy thereof, or oxide thereof. ### Claim 10 (depends on 1) The element of claim 1, further comprising an upper electrode and a lower electrode which sandwich said magnetoresistive element, and further comprising a write circuit which bi-directionally supplies a current to said magnetoresistive element, and a select transistor electrically connected between said magnetoresistive elements and said write circuit. ### Claim 11 A method of manufacturing a perpendicular magnetic tunnel junction (put) element having a sidewall-current-channel (SCC) structure for being used in a magnetic memory device, the method comprising the steps of: providing a bottom electrode; depositing an MTJ stack over the bottom electrode, wherein the MTJ stack comprises at least a magnetic reference layer, a tunnel barrier layer provided on a top surface of the magnetic reference layer and a magnetic recording layer provided on a top surface of the tunnel barrier layer; depositing an insulating medium layer over the MTJ stack; depositing a protective cap layer over the insulating medium layer; depositing a hard mask layer over the protective cap layer; conducting a photolithographic process to form a patterned hard mask having an opening exposed area on the protective cap layer; first etching the protective cap layer and the insulating medium layer not covered by the patterned hard mask; forming a conductive encapsulation layer on the top surface of the patterned hard mask, on the top surface of the etched insulating medium layer and on sidewalls of the insulating medium layer, the protective cap layer and the hard mask, wherein the conductive encapsulation layer is a conformal layer made of an electrically conductive material; second etching away the conductive encapsulation layer on horizontal surfaces, leaving the conductive encapsulation layer on vertical sidewalls of the insulating medium layer, the protective cap layer and the hard mask, wherein sidewalls of the insulating medium layer are covered by the conductive encapsulation layer forming a conductive medium electrically connecting the magnetic recording layer and the protective cap layer; third etching the MTJ stack to form a plurality of MTJ cells; and forming a dielectric encapsulation layer on the top surface of the patterned hard mask and on sidewalls of the MTJ stack and the conductive encapsulation layer, wherein the dielectric encapsulation layer is made of an electrically insulating material. ### Claim 12 (depends on 11) The element of claim 11, wherein said conductive medium comprises at least one layer of metal or metal alloy or conductive metal nitride material, preferred to be Ru, Mo, W, Ta, Ti, Cr, V, Hf, Nb, Zr, Fe, Co, Ni, Cu, Pt, Au, Ag, Rh, Ir, Os, Re, or alloy thereof, or nitride thereof. ### Claim 13 (depends on 11) The element of claim 11, wherein said insulating medium layer has a thickness of at least 12 angstroms and comprises at least one layer of oxide or nitride, preferred to be selected from the group consisting of MgO, MgAl2O4, Al2O3, HfO2, ZrO2, TiO2, SiO2, Y2O3, RuO, OsO, TcO, ReO, BeO, SiN, RuN, OsN, TcN, ReN, NiO, CoO, FeO, FeCoO2, NiFeO2, CoNiO2, MnO, CrO, VO, TiO, ZnO and CdO. ### Claim 14 (depends on 11) The element of claim 11, wherein said first etching stops within a lower-half portion of said insulating medium layer or at a bottom surface of said insulating medium layer. ### Claim 15 (depends on 11) The element of claim 11, further comprising, after forming said conductive encapsulation layer, a sacrificial encapsulation layer of a dielectric material, the dielectric material is preferred to at least one selected from the group consisting of SiNx, SiO2, SiOxNy, SiC and amorphous Carbon. ### Claim 16 (depends on 11) The element of claim 11, wherein said second etching comprises a vertical etching using collimated reactive ion beam or collimated ion beam to remove said conductive encapsulation layer on horizontal surfaces. ### Claim 17 (depends on 11) The element of claim 11, further comprising, after depositing said MTJ stack, forming a perpendicular anisotropy enhancement layer, wherein said perpendicular anisotropy enhancement layer comprises at least one layer of Ru, Mg, Mo, W, Ta, Ti, Cr, V, Hf, Nb, Zr, Fe, Co, Ni, Al, Cu, Pt, Au, Ag, Rh, Ir, Os, Re, or alloy thereof, or oxide thereof. ### Claim 18 (depends on 11) The element of claim 11, further comprising, after forming said dielectric encapsulation layer, refilling a dielectric layer, conducting a CMP process and forming a top electrode. ### Claim 19 A magnetoresistive element comprising: a magnetic reference layer having a perpendicular magnetic anisotropy and having an invariable magnetization direction; a tunnel barrier layer provided on the magnetic reference layer; a magnetic recording layer provided on the tunnel barrier layer and having a perpendicular magnetic anisotropy and a variable magnetization direction; a nonmagnetic nano-current-crowding channel (NCC) structure provided on the magnetic recording layer; a protective cap layer provided on the NCC structure; and a hard mask layer provided on the protective cap layer; wherein said tunnel barrier layer has a first resistance-area product, said NCC structure comprises an insulating medium throughout said NCC thickness, and a conductive medium throughout said NCC thickness, the insulating medium comprising an insulating oxide or nitride material and having a second resistance-area product, the second resistance-area product being larger than the first resistance-area product, the conductive medium comprising a metal or metal alloy or metal nitride material and being an electrically conductive path between the magnetic recording layer and the protective cap layer, said magnetic recording layer has a sufficiently small sheet resistance so that an electric current crowding occurs in said magnetic recording layer while the current density across said tunnel barrier layer is substantially uniform when a voltage is applied to said magnetoresistive element. ### Claim 20 A magnetoresistive element comprising: a bottom electrode provided on a substrate; a sidewall-current-channel (SCC) structure provided on the bottom electrode, wherein the SCC structure comprises an insulating medium in a central region of the SCC structure, and a conductive medium being a vertical sidewall of the SCC structure and surrounding the insulating medium; a perpendicular anisotropy enhancement layer provided on the insulating medium; a magnetic recording layer provided on the perpendicular anisotropy enhancement layer and having a perpendicular magnetic anisotropy and a variable magnetization direction; a tunnel barrier layer provided on the magnetic recording layer; a magnetic reference layer provided on the tunnel barrier layer and having a perpendicular magnetic anisotropy and having an invariable magnetization direction; a protective cap layer provided on the insulating medium; and a hard mask layer provided on the protective cap layer; wherein the tunnel barrier layer has a first resistance-area product (RA1), the insulating medium comprises an insulating oxide or nitride material and has a second resistance-area product (RA2), the second resistance-area product (RA2) is higher than the first resistance-area product (RA1), the conductive medium comprises a conductive material making electrical connection between the magnetic recording layer and the bottom electrode layer.