# US 2022/0044951 A1 · Container and substrate treating apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2022/0044951 A1 - Document ID: US20220044951A1 - Status: Published application - Kind: A1 - Application number: 17/396,267 - Filed: 2021-08-06 - Published: 2022-02-10 - Earliest claimed: 2020-08-07 - Assignees: Semes Co., Ltd. - Applicants: Semes Co., Ltd. - Inventors: DUKHYUN SON; BYUNG KYU KIM - Web page: https://patentgrep.com/patent/US20220044951A1 ## CPC - H10P 72/1921: {characterised by substrate supports} - H10P 72/1912: {characterised by shock absorbing elements, e.g. retainers or cushions} - H10P 72/3222: {Loading to or unloading from a conveyor} - H10P 72/1918: {characterised by coupling elements, kinematic members, handles or elements to be externally gripped} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Disclosed is a container. The container includes a housing having an interior space, and a support part that supports an expendable component in the interior space, and the support part includes an alignment pin that aligns the expendable component. ## Claims ### Claim 1 A container comprising: a housing having an interior space; and a support part configured to support an expendable component in the interior space, wherein the support part includes: an alignment pin configured to align the expendable component. ### Claim 2 (depends on 1) The container of claim 1, wherein the support part further includes: at least one support slot; and an alignment block installed in the support slot to be detachable, and having the alignment pin. ### Claim 3 (depends on 2) The container of claim 2, wherein the support part further includes: at least one guide pin configured to guide a location of the alignment block inserted into the support slot. ### Claim 4 (depends on 3) The container of claim 3, wherein the alignment block has a protrusion or a guide groove that guides insertion of the alignment block at at least any one of surfaces, which contacts the support slot. ### Claim 5 (depends on 4) The container of claim 4, wherein at least one of surfaces of the support slot, which contacts the alignment block, has a shape corresponding to the protrusion or the guide groove. ### Claim 6 (depends on 2) The container of claim 2, wherein any one selected from a first alignment block, and a second alignment block, of which a location of the alignment pin is different from that of the first alignment block, is installed in the support slot. ### Claim 7 (depends on 1) The container of claim 1, wherein the alignment pin is inserted into a groove formed in the expendable component. ### Claim 8 (depends on 7) The container of claim 7, wherein the expendable component has a ring shape. ### Claim 9 (depends on 1) The container of claim 1, wherein the support part supports a substrate type sensor having a notch, in the interior space, and wherein the container further includes a notch aligning member inserted into the notch and configured to align the sensor. ### Claim 10 (depends on 1) The container of claim 1, further comprising: a partition plate configured to partition the interior space into a space, in which an unused expendable component is received, and a space, in which a used expendable component is received. ### Claim 11 A substrate treating apparatus comprising: a process chamber configured to perform a treatment process; a load pot configured to receive an expendable component of the process chamber and in which a container having an interior space is seated; and a transfer robot configured to transfer the expendable component between the process chamber and the container, wherein the container includes: a support part having: a plurality of support slots that support the expendable component; and an alignment block detachably mounted on the support slot and provided with an alignment pin inserted into a groove formed in the expendable component. ### Claim 12 (depends on 11) The substrate treating apparatus of claim 11, further comprising: a controller, wherein the controller controls the transfer robot such that the transfer robot transfers the expendable component used in the process chamber to the interior space and transfers an unused expendable component in the interior space to the process chamber. ### Claim 13 (depends on 11) The substrate treating apparatus of claim 11, wherein a controller controls the transfer robot such that a transfer speed of the expendable component is lower than a transfer speed of a substrate. ### Claim 14 (depends on 11) The substrate treating apparatus of claim 11, further comprising: a partition plate configured to partition the interior space into a space, in which an unused expendable component is received, and a space, in which a used expendable component is received. ### Claim 15 (depends on 14) The substrate treating apparatus of claim 14, wherein the alignment block is installed in the support slot of the space, in which the unused expendable component is received. ### Claim 16 (depends on 11) The substrate treating apparatus of claim 11, further comprising: a groove, into which the alignment pin is inserted, is formed on a bottom surface of the expendable component. ### Claim 17 A substrate treating apparatus comprising: a process chamber configured to treat a substrate by using plasma; a load pot, in which a container that receives a focusing ring provided in the process chamber is seated; and a transfer robot configured to transfer the focusing ring between the process chamber and the container, wherein the container includes: a support part having: a plurality of support slots that support the focusing ring; and an alignment block detachably mounted on the support slot and provided with an alignment pin inserted into a groove formed in the focusing ring. ### Claim 18 (depends on 17) The substrate treating apparatus of claim 17, wherein the support part includes: a plurality of guide pins configured to guide a location of the alignment block inserted into the support slot, and wherein the alignment block has a protrusion or a guide groove that guides insertion of the alignment block into at least any one of surfaces, which contacts the support slot. ### Claim 19 (depends on 18) The substrate treating apparatus of claim 18, wherein the container further includes: a notch aligning member inserted into a notch formed in a substrate type sensor received in the container, and configured to align the substrate type sensor. ### Claim 20 (depends on 17) The substrate treating apparatus of claim 17, further comprising: a controller, wherein the controller controls the transfer robot such that the transfer robot transfers the focusing ring that has been used in the process chamber to the container, and transfers the used focusing ring that is transferred to the container to a location below an unused focusing ring seated in the container.