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US 2022/0043254 A1Published application
Method for determining a torsion angle of a mirror body of an mems apparatus
AssigneeInfineon Technologies AG
InventorFranz Michael DARRER
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Abstract
A method comprises applying a driver voltage to an electrostatic comb drive of an MEMS apparatus and overlaying the driver voltage with a periodic voltage signal. The method further comprises determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal.
Claims21
A method, comprising:
- applying a driver voltage to an electrostatic comb drive of an MEMS apparatus;
- overlaying the driver voltage with a periodic voltage signal;
- and
- determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal.
1 more element
An MEMS apparatus, comprising:
- a mirror body;
- one or more electrostatic comb drives for twisting the mirror body based on one or more driver voltages;
- a unit for overlaying the one or more driver voltages with one or more periodic voltage signals;
- and
- a unit for determining a torsion angle of the mirror body based on the one or more periodic voltage signals.
2 more elements
Dependencies are inferred from the claim text.