Diaphragm, mems microphone having the same and method of manufacturing the same

A MEMS microphone comprising:

• a substrate presenting a vibration area, a supporting area surrounding the vibration area and a peripheral area surrounding the supporting area, the substrate defining a cavity formed in the vibration area;
• a diaphragm disposed in the vibration area, being spaced apart from the substrate, covering the cavity, and configured to generate a displacement thereof in response to an applied acoustic pressure, the diaphragm defining a plurality of vent holes;
• and
• a back plate disposed over the diaphragm in the vibration area, the back plate being spaced apart from the diaphragm to maintain an air gap between the back plate and the diaphragm, the back plate defining a plurality of acoustic holes,
• wherein the vent holes have a bent shape to increase the length of the vent holes.

A method of manufacturing a MEMS microphone comprising:

• forming a lower insulation layer on a substrate, the substrate having a vibration area, a supporting area surrounding the vibration area, and a peripheral area surrounding the supporting area;
• forming a diaphragm on the lower insulation layer, the diaphragm disposed in the vibration area and having a plurality of vent holes;
• forming an intermediate insulation layer on the lower insulation layer covering the diaphragm;
• forming a back plate on the intermediate insulation layer in the vibration area facing the diaphragm;
• and
• forming an upper insulation layer on the intermediate insulation layer configured to hold the back plate apart from the diaphragm,
• wherein the vent holes have a bent shape to increase the length of the vent holes.