MEMS microphone assembly and method for fabricating a MEMS microphone assembly

A method of fabricating a micro-electro-mechanical system, MEMS, microphone assembly, the method comprising:

• providing an enclosure defining a first cavity, the enclosure comprising an acoustic inlet port that connects the first cavity to an environment of the assembly;
• arranging a first die of a MEMS microphone inside the first cavity, the first die comprising a MEMS diaphragm and bonding structures;
• and
• arranging a second die of the MEMS microphone inside the first cavity, the second die comprising an application specific integrated circuit, ASIC;
• wherein
• the second die is bonded to the bonding structures such that a gap is formed between the diaphragm and the second die, with the gap defining a second cavity and having a gap height;
• a first side of the diaphragm is interfacing with the second cavity and a second side of the diaphragm is interfacing with the environment via the acoustic inlet port;
• and
• the bonding structures are arranged such that pressure ventilation openings are formed that connect the first cavity and the second cavity.