# US 2022/0034825 A1 · Measurement arrangement for x-ray radiation for gap-free id measurement

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- Number: US 2022/0034825 A1
- Document ID: US20220034825A1
- Status: Published application
- Kind: A1
- Application number: 17/432,676
- Filed: 2020-02-18
- Published: 2022-02-03
- Earliest claimed: 2019-02-22
- Assignees: Bruker AXS GmbH
- Applicants: Bruker AXS GmbH
- Inventors: Jürgen FINK; Christian MAURER; Lutz BRÜGEMANN; Cristian VENANZI
- Web page: https://patentgrep.com/patent/US20220034825A1

## CPC

- G01N 23/20008: Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor (monochromators for X- rays using crystals G21K1/06)
- G01N 23/207: Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
- G01N 2223/501: array
- G01N 2223/62: powders
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

In summary, the present invention proposes embodying an X-ray detector (21) with a plurality of detector modules (1, 1a-1g), each comprising dead zones (6) without X-ray sensitivity and active zones (3, 3a-3c) with X-ray sensitivity that is spatially resolved in a measurement direction (MR), wherein the detector modules (1, 1a-1g) are embodied successively and in an overlapping fashion along the measurement direction (MR), such that in overlap regions (23a-23e) the dead zone (6) of one detector module (1, 1a-1g) is bridged by an active zone (3, 3a-3c) of another detector module (1, 1a-1g). The overlapping detector modules (1, 1a-1g) are arranged next to one another in the transverse direction (QR) in the overlap regions (23a-23e), wherein the transverse direction (QR) runs transversely with respect to the local measurement direction (MR) and transversely with respect to a local connection direction (VR) with respect to a sample position (91). The X-ray detector (21) makes it possible, in a simple manner, to obtain gapless, one-dimensional measurement information, in particular X-ray diffraction information, from a measurement sample (96) at the sample position (91).

## Claims

### Claim 1

A measurement arrangement for X-ray radiation, comprising:
a sample position illuminatable by an X-ray beam, and
an X-ray detector for detecting the X-ray radiation emanating from the sample position, comprising a plurality of detector modules,
wherein the detector modules each have at least one active zone, in which X-ray radiation can be detected, and a dead zone in which no X-ray radiation can be detected and which encloses the at least one active zone,
wherein the detector modules are arranged successively in groups and/or individually in relation to a measurement direction,
wherein the active zones of the detector modules are configured in each case for X-ray radiation detection which is spatially resolved in the measurement direction,
wherein the totality of the active zones of all the detector modules of the X-ray detector has an extent AM in the measurement direction and an extent AQ in a transverse direction, where AM≥5*AQ, wherein the transverse direction runs locally transversely with respect to the measurement direction and locally transversely with respect to a connection direction with respect to the sample position,
wherein at least one portion of the detector modules that are successive in relation to the measurement direction forms overlap regions in which in each case at least two detector modules overlap in the measurement direction and are arranged next to one another in the transverse direction,
wherein the active zones of the detector modules in the overlap regions are directly adjacent to one another in the measurement direction or overlap in the measurement direction, such that the totality of the active zones of the detector modules enables the X-ray radiation emanating from the sample position to be measured without gaps in the measurement direction, and
wherein the detector modules are arranged along a circular arc around the sample position in an overlapping fashion, wherein the circular arc defines the local measurement direction at each detector module, and the detector modules are each embodied on a planar substrate oriented perpendicular to the local connection direction with respect to the sample position
and wherein at the respective detector module the measurement direction, the transverse direction and the connection direction are approximately perpendicular to one another.

### Claim 2 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein the detector modules comprise first detector modules and second detector modules,
wherein the first detector modules are arranged one behind another in a first row in the measurement direction, and the second detector modules are arranged one behind another in at least one second row in the measurement direction,
wherein the first row and the at least one second row are arranged next to one another in relation to the transverse direction, and
wherein the first detector modules, relative to the second detector modules, are arranged offset relative to one another in the measurement direction, such that the active zones of the second detector modules overlap dead zones of the first detector modules, which in the measurement direction are not overlapped by active zones of the first detector modules in the measurement direction.

### Claim 3 (depends on 2)

The measurement arrangement as claimed in claim 2, wherein, for a first length L1 in the measurement direction, over which the active zone or active zones of a first detector module extend(s), and for a second length L2 in the measurement direction, which lies between the active zones of second detector modules which are successive in the at least one second row in the measurement direction and which both form an overlap region with the first detector module, L2≥0.2*L1.

### Claim 4 (depends on 2)

The measurement arrangement as claimed in claim 2, wherein the first row and the at least one second row comprise at least one spacing-exhibiting row in which the detector modules that are successive in the measurement direction are arranged in a manner spaced apart from one another with a spacing AB in relation to the measurement direction.

### Claim 5 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein the detector modules are arranged one behind another in only one row in the measurement direction, wherein in the overlap regions the detector modules also overlap in the transverse direction.

### Claim 6 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein the detector modules are embodied as approximately wedge-shaped and/or interlocked in the overlap regions.

### Claim 7 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein in the overlap regions the active zones of the overlapping detector modules overlap in double measurement regions in the measurement direction.

### Claim 8 (depends on 7)

The measurement arrangement as claimed in claim 7, wherein the active zones of the detector modules are embodied in a shortened fashion in relation to the transverse direction in the double measurement regions in comparison with outside the double measurement regions.

### Claim 9 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein in the overlap regions the active zones of the overlapping detector modules do not overlap in the measurement direction.

### Claim 10 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein the at least one active zone of a respective detector module has a plurality of sensor strips which are successive in the measurement direction and which extend at least substantially in the transverse direction.

### Claim 11 (depends on 10)

The measurement arrangement as claimed in claim 10, wherein at all positions along the measurement direction a cumulative effective strip length in the transverse direction of the sensor strips of all the detector modules which form a sensor strip at the respective position is identical.

### Claim 12 (depends on 10)

The measurement arrangement as claimed in claim 10, wherein at least one portion of the sensor strips (4a-4d) has at least one sensor element having a sensor element aspect ratio SEAV≥3, wherein SEAV=SEB/SEH where SEB is a width of the sensor element in the transverse direction, and SEH is a height of the sensor element in the measurement direction.

### Claim 13 (depends on 10)

The measurement arrangement as claimed in claim 10, wherein the sensor strips are embodied as approximately rectangular, wherein the longitudinal sides of the sensor strips extend in the transverse direction, and wherein the longitudinal sides of sensor strips of a respective active zone that are successive in the measurement direction lie against one another.

### Claim 14

(canceled)

### Claim 15 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein in the overlap regions the active zones of the overlapping detector modules overlap in double measurement regions in the measurement direction,
wherein the active zones of the detector modules are embodied in a shortened fashion in relation to the transverse direction in the double measurement regions in comparison with outside the double measurement regions,
wherein the at least one active zone of a respective detector module has a plurality of sensor strips which are successive in the measurement direction and which extend at least substantially in the transverse direction,
and wherein at all positions along the measurement direction a cumulative effective strip length in the transverse direction of the sensor strips of all the detector modules which form a sensor strip at the respective position is identical.

### Claim 16 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein the detector modules are embodied as semiconductor detector modules.

### Claim 17 (depends on 1)

The measurement arrangement as claimed in claim 1, wherein a mask is arranged in front of the detector modules, which mask shades at least partial areas of at least one portion of the active zones of the detector modules with regard to the sample position and thereby reduces a usable width of the totality of the active zones in the transverse direction compared with a full width of the totality of the active zones without shading.

### Claim 18 (depends on 1)

The use of a measurement arrangement as claimed in claim 1 for measuring a measurement sample (96),
wherein the measurement sample is irradiated by an X-ray beam and is arranged at the sample position or is imaged onto the sample position by an X-ray optical unit, and
wherein measurement data of the detector modules which were measured simultaneously are combined to form a one-dimensional total measurement data set having no gaps in relation to the positions along the measurement direction,
wherein at positions along the measurement direction in which, in an overlap region of at least two detector modules, there lies only a dead zone of at least one of the overlapping detector modules, measurement data of at least one other detector module of the overlapping detector modules which has an active zone at this position are used in order to determine the continuous total measurement data set.

### Claim 19 (depends on 3)

The measurement arrangement as claimed in claim 3, wherein L2≥0.4*L1.

### Claim 20 (depends on 4)

The measurement arrangement as claimed in claim 4, wherein AB≥0.3*LM, where LM is a length of the detector modules in the spacing-exhibiting row in the measurement direction.

### Claim 21 (depends on 12)

The measurement arrangement as claimed in claim 12, wherein the at least one portion of the sensor strips includes each sensor strip.
