# US 2022/0034792 A1 · Spectrophotometer, spectrometer, and method of manufacturing spectrophotometer

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- Number: US 2022/0034792 A1
- Document ID: US20220034792A1
- Status: Published application
- Kind: A1
- Application number: 17/277,412
- Filed: 2019-11-19
- Published: 2022-02-03
- Earliest claimed: 2018-12-20
- Assignees: Hitachi High-Tech Corporation
- Applicants: Hitachi High-Tech Corporation
- Inventors: Kenta YAEGASHI; Yoshisada EBATA; Takanori AONO
- Web page: https://patentgrep.com/patent/US20220034792A1

## CPC

- G01J 3/04: Slit arrangements {slit adjustment}
- G01N 21/31: Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry {(G01N21/72 takes precedence)}
- G01J 3/0229: {using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters}
- G01J 3/20: Rowland circle spectrometers
- G01J 3/36: Investigating two or more bands of a spectrum by separate detectors
- G01N 21/255: {Details, e.g. use of specially adapted sources, lighting or optical systems}
- G01N 21/27: using photo-electric detection (G01N21/31 takes precedence){; circuits for computing concentration (logarithmic circuits G06G7/24; photometric circuits in general G01J)}
- G01N 35/00584: {Control arrangements for automatic analysers}
- G02B 5/1847: {Manufacturing methods}
- G02B 5/1861: {Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials (G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence)}
- G01N 2035/0439: {Rotary sample carriers, i.e. carousels}
- G01N 2201/061: Sources
- G01N 2201/0635: Structured illumination, e.g. with grating
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A spectrophotometer 300 includes a white light source 212, condenser lenses 242a, 242b that collect light emitted from the white light source 212, a slit 245 that diffracts the light collected by the condenser lenses 242a, 242b, a concave diffraction grating 246 that splits the light having passed through the slit 245, and a multi-wavelength detector 248 having a plurality of photodetection elements 304 that detect the light split by the concave diffraction grating 246, and each of the plurality of photodetection elements 304 included in the multi-wavelength detector 248 is arranged at an image position of the concave diffraction grating 246.

## Claims

### Claim 1

A spectrophotometer, comprising:
a light source;
a condenser lens that collects light emitted from the light source;
a slit that diffracts the light collected by the condenser lens;
a concave diffraction grating that splits the light passing through the slit; and
a multi-wavelength detector having a plurality of photodetection elements that detect the light split by the concave diffraction grating,
wherein each of the plurality of photodetection elements included in the multi-wavelength detector is arranged at an image position of the concave diffraction grating.

### Claim 2 (depends on 1)

The spectrophotometer according to claim 1,
wherein the multi-wavelength detector further comprises a substrate made of a material having the same linear expansion coefficient as that of a main substrate constituting the concave diffraction grating and a flexible wiring substrate having the plurality of photodetection elements arranged thereon.

### Claim 3 (depends on 2)

The spectrophotometer according to claim 2,
wherein a surface of the substrate on which the flexible wiring substrate 303 is fixed is curved.

### Claim 4 (depends on 3)

The spectrophotometer according to claim 3,
wherein groove periods of grooves provided on the surface of the concave diffraction grating are regular, and
wherein the plurality of photodetection elements are arranged on a Rowland circle.

### Claim 5 (depends on 3)

The spectrophotometer according to claim 3,
wherein groove periods of grooves provided on the surface of the concave diffraction grating are irregular, and
wherein the plurality of photodetection elements are arranged on a lemniscate.

### Claim 6 (depends on 2)

The spectrophotometer according to claim 2,
wherein a material of adhesive layer that bonds the flexible wiring substrate and the substrate in the multi-wavelength detector and a material of an adhesive layer used for the concave diffraction grating have the same linear expansion coefficient.

### Claim 7 (depends on 2)

The spectrophotometer according to claim 2,
wherein the substrate is made of the same material as that of the main substrate of the concave diffraction grating.

### Claim 8 (depends on 1)

The spectrophotometer according to claim 1,
wherein each of the photodetection elements 304 is arranged at an image position so as to detect all the split light.

### Claim 9

A spectrophotometer, comprising:
a light source;
a condenser lens that collects light emitted from the light source;
a slit that diffracts the light collected by the condenser lens;
a concave diffraction grating that splits the light passing through the slit; and
a multi-wavelength detector having a plurality of photodetection elements that detect the light split by the concave diffraction grating,
wherein each opening of the photodetection element mask to be arranged on the surface of the multi-wavelength detector is arranged at an image position of the concave diffraction grating.

### Claim 10 (depends on 9)

The spectrophotometer according to claim 9,
wherein the photodetection element mask is mounted on a substrate having a curved surface, and the plurality of photodetection elements are arranged on a surface side opposite from the curved surface of the substrate.

### Claim 11 (depends on 10)

The spectrophotometer according to claim 10,
wherein groove periods of grooves provided on the surface of the concave diffraction grating are regular, and
wherein the opening is arranged on a Rowland circle.

### Claim 12 (depends on 10)

The spectrophotometer according to claim 10,
groove periods of grooves provided on the surface of the concave diffraction grating are irregular, and
wherein the opening is arranged on a lemniscate.

### Claim 13 (depends on 10)

The spectrophotometer according to claim 10,
wherein the plurality of photodetection elements are arranged on a plane.

### Claim 14 (depends on 1)

A spectrometer that analyzes a sample, comprising:
a plurality of reaction vessels that contain reaction liquid including the sample and reagent mixed and reacted therein; and
the spectrophotometer according to claim 1 that irradiates the reaction vessel with light and detects light coming out of the reaction liquid held in the reaction vessel.

### Claim 15

A method of manufacturing a spectrophotometer comprising: a light source; a condenser lens that collects light emitted from the light source; a slit that diffracts the light collected by the condenser lens; a concave diffraction grating that splits the light passing through the slit; and a multi-wavelength detector having a plurality of photodetection elements that detect the light split by the concave diffraction grating, the method comprising:
arranging each opening of a photodetection element mask to be arranged on a surface of the multi-wavelength detector at an image position of the concave diffraction grating.
