Systems and methods for ozone degradation for a plasma treatment system
AssigneeIllinois Tool Works Inc.
InventorRory Wolf
Life of this patent
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Abstract
The present disclosure describes material surface treatment systems and methods that employ a byproduct treatment system to receive a byproduct generated by application of a plasma, the byproduct treatment system configured to degrade the byproduct and exhaust the degraded byproduct from the material surface treatment. The disclosed byproduct treatment system modifies the byproduct prior to evacuation from the material treatment system in order to reduce or eliminate byproduct contamination into the surrounding atmosphere.
Claims20
A material surface treatment system comprising:
- an electrode to generate an electric discharge to create a plasma comprised of ionized process gases and apply the plasma to a material near the electrode in a treatment environment;
- and
- a byproduct treatment system to receive a byproduct generated by application of the plasma, the byproduct treatment system configured to degrade the byproduct and exhaust the degraded byproduct from the material surface treatment.
A material surface treatment system comprising:
- an electrode to generate an electric discharge to create a plasma comprised of ionized process gases and apply the plasma to a material near the electrode in a treatment environment;
- and
- a byproduct treatment system arranged collinear with a portion of the electrode, the byproduct treatment system configured to:
- receive a byproduct generated by application of the plasma from the treatment environment;
- and
- degrade the byproduct and exhaust the degraded byproduct from the material surface treatment.
A material surface treatment system comprising:
- an electrode to generate an electric discharge to create a plasma comprised of ionized process gases and apply the plasma to a material near the electrode in a treatment environment;
- and
- a byproduct treatment system to receive a byproduct generated by application of the plasma, the byproduct treatment system comprising a radiation source configured to irradiate the byproduct to cause the byproduct to degrade.
Dependencies are inferred from the claim text.