# US 2022/0032501 A1 · Method for manufacturing three-dimensional fired body > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2022/0032501 A1 - Document ID: US20220032501A1 - Status: Published application - Kind: A1 - Application number: 17/451,204 - Filed: 2021-10-18 - Published: 2022-02-03 - Earliest claimed: 2019-04-25 - Assignees: NGK Insulators, Ltd. - Applicants: Ngk Insulators, Ltd. - Inventors: Yasuho AOKI; Masashi ONO - Web page: https://patentgrep.com/patent/US20220032501A1 ## CPC - B28B 7/342: {which are at least partially destroyed, e.g. broken, molten, before demoulding; Moulding surfaces or spaces shaped by, or in, the ground, or sand or soil, whether bound or not; Cores consisting at least mainly of sand or soil, whether bound or not} - B28B 7/346: {Manufacture of moulds} - B28B 1/14: by simple casting, the material being neither forcibly fed nor positively compacted (for molten material B28B1/54) - B28B 7/18: the holes passing completely through the article - B28B 7/348: {of plastic material or rubber} - B28B 11/243: {Setting, e.g. drying, dehydrating or firing ceramic articles (B28B11/242 takes precedence)} - B29C 64/10: Processes of additive manufacturing - B33Y 80/00: Products made by additive manufacturing - C04B 35/624: Sol-gel processing - C04B 35/638: Removal thereof - C04B 2235/602: Making the green bodies or pre-forms by moulding - C04B 2235/6028: Shaping around a core which is removed later - B28B: SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER (foundry moulding B22C; working stone or stone-like material B28D; shaping of substances in a plastic state, in general B29C; making layered products not composed wholly of these substances B32B) - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - B33Y: ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING - C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE ## Abstract A method for manufacturing a three-dimensional fired body includes (a) a step of producing a shaping mold using an organic material, the shaping mold having a shaping space which has the same shape as a shaped body having a hollow portion that opens to an outer surface thereof, in which a core corresponding to the hollow portion is integrated with the shaping mold; (b) a step of producing the shaped body in the shaping mold by pouring a ceramic slurry into the shaping space and solidifying the ceramic slurry; (c) a step of drying and then degreasing the shaped body, in which the shaping mold is eliminated in any one of the following stages: before drying, during drying, after drying and before degreasing, during degreasing, and after degreasing of the shaped body; and (d) a step of firing the shaped body to obtain a three-dimensional fired body. ## Claims ### Claim 1 A method for manufacturing a three-dimensional fired body comprising: (a) a step of producing a shaping mold using an organic material, the shaping mold having a shaping space which has the same shape as a shaped body having a hollow portion that opens to an outer surface thereof, wherein a core corresponding to the hollow portion is integrated with the shaping mold; (b) a step of producing the shaped body in the shaping mold by pouring a ceramic slurry into the shaping space of the shaping mold and solidifying the ceramic slurry; (c) a step of drying and then degreasing the shaped body, wherein the shaping mold is eliminated in any one of the following stages: before drying, during drying, after drying and before degreasing, during degreasing, and after degreasing of the shaped body; and (d) a step of firing the shaped body to obtain a three-dimensional fired body. ### Claim 2 (depends on 1) The method for manufacturing a three-dimensional fired body according to claim 1, wherein, in the step (c), the shaping mold is eliminated by melting and removing the shaping mold. ### Claim 3 (depends on 2) The method for manufacturing a three-dimensional fired body according to claim 2, wherein, in the step (c), the shaping mold is eliminated by melting and removing the shaping mold under the conditions in which components of the shaped body are not melted and removed. ### Claim 4 (depends on 1) The method for manufacturing a three-dimensional fired body according to claim 1, wherein, in the step (a), the shaping mold is produced using a 3D printer, and in the 3D printer, as a model material, a material that, after being hardened, is insoluble in a predetermined cleaning solution and components contained in the ceramic slurry is used, and as a support material, a material that, after being hardened, is soluble in the predetermined cleaning solution is used. ### Claim 5 (depends on 1) The method for manufacturing a three-dimensional fired body according to claim 1, wherein, in the step (b), a slurry containing a ceramic powder and a gelling agent is used as the ceramic slurry, and after the ceramic slurry is poured into the shaping mold, by subjecting the gelling agent to a chemical reaction to form the ceramic slurry into a gel, the shaped body is produced in the shaping mold. ### Claim 6 (depends on 1) The method for manufacturing a three-dimensional fired body according to claim 1, wherein the three-dimensional fired body is a plug which is fitted into a plug installation hole provided on a surface opposite to a wafer placement surface of an electrostatic chuck, the plug having a gas passage that passes through the electrostatic chuck in the thickness direction thereof in a winding manner; wherein the plug is used to supply a gas through the gas passage to a thin hole that is provided on the bottom of the plug installation hole so as to pass through the electrostatic chuck in the thickness direction thereof.