Soft x-ray light source

A soft X-ray light source, comprising a vacuum target chamber, a refrigeration cavity, and a nozzle, wherein the refrigeration cavity and the nozzle are received in the vacuum target chamber, and the nozzle is arranged in the refrigeration cavity, characterized in that the vacuum target chamber comprises:

• a t-branch tube, having a first outlet and a second outlet opposed to each other as well as a third outlet located between the first outlet and the second outlet, wherein the first outlet is connected to a mounting plate through which a refrigerant inlet pipe, a refrigerant outlet pipe, and a working gas pipe respectively pass and are connected to the refrigeration cavity, and wherein the third outlet is connected to a vacuum extraction device;
• and
• a multi-channel tube, comprising a top opening and a bottom opening opposed to each other as well as a plurality of side openings located between the top opening and the bottom opening, wherein the top opening is tightly connected to the second outlet, wherein a vacuum outlet is provided at the bottom opening, wherein the nozzle has a position corresponding to those of the side openings, wherein provided under the nozzle is a groove which is fixed by an adapter arranged at the vacuum outlet, and wherein the groove is in communication with the vacuum outlet.