Ceramic heater with shaft
AssigneeNGK Insulators, Ltd.
InventorsKenichiro AIKAWA, Hiroshi Takebayashi, Tatsuya Kuno
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Abstract
A ceramic heater with a shaft includes a ceramic plate in which an RF electrode and a resistance heating element are embedded; a hollow ceramic shaft provided on a surface on an opposite side of a wafer placement surface of the ceramic plate; an RF power supply rod which is housed in an inner space of the ceramic shaft, and a heating element power supply rod which is housed in the inner space of the ceramic shaft, wherein an outer circumferential surface of a portion of at least one of the RF power supply rod and the heating element power supply rod is covered with an insulating thin film which is an aerosol deposition film or a thermal spray film, the portion being located in the inner space of the ceramic shaft.
Claims3
A ceramic heater with a shaft, comprising:
- a ceramic plate in which an RF electrode and a resistance heating element are embedded;
- a hollow ceramic shaft provided on a surface on an opposite side of a wafer placement surface of the ceramic plate;
- an RF power supply rod which is housed in an inner space of the ceramic shaft, and bonded to the RF electrode from the surface on the opposite side of the wafer placement surface of the ceramic plate;
- and
- a heating element power supply rod which is housed in the inner space of the ceramic shaft, and bonded to the resistance heating element from the surface on the opposite side of the wafer placement surface of the ceramic plate,
- wherein an outer circumferential surface of a portion of at least one of the RF power supply rod and the heating element power supply rod is covered with an insulating thin film which is an aerosol deposition film or a thermal spray film, the portion being located in the inner space of the ceramic shaft.
Dependencies are inferred from the claim text.