Ceramic heater with shaft
AssigneeNGK Insulators, Ltd.
InventorsTatsuya KUNO, Hiroshi TAKEBAYASHI, Kenichiro AIKAWA
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Abstract
A ceramic heater with a shaft includes: a ceramic plate in which resistance heating elements are embedded; a hollow ceramic shaft bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate; multiple vertical grooves provided in an internal circumferential surface of the ceramic shaft in an axial direction; conductive films provided in the multiple vertical grooves, respectively; and connection members that each electrically connect a terminal of the resistance heating elements to a corresponding one of the conductive films.
Claims4
A ceramic heater with a shaft, comprising:
- a ceramic plate in which resistance heating elements are embedded;
- a hollow ceramic shaft bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate;
- multiple vertical grooves provided in an internal circumferential surface of the ceramic shaft in an axial direction;
- conductive films provided in the multiple vertical grooves, respectively;
- and
- connection members that each electrically connect a terminal of the resistance heating elements to a corresponding one of the conductive films.
Dependencies are inferred from the claim text.