Apparatus for Detecting a Transient Thermal Gradient in a Substrate

Abstract

An apparatus detects a transient thermal gradient in a substrate. The apparatus is comprised of an electromagnetic radiation source configured to emit source electromagnetic radiation; a fast shutter configured to block the source electromagnetic radiation when closed, and open in response to a command to pulse the source electromagnetic radiation; a substrate support that supports a substrate disposed to emit a pulsed radiation from a back side of the substrate when the source electromagnetic radiation is pulsed through the substrate; and a detector configured to face the back side of the substrate. The detector is used to detect a transient thermal gradient in the pulsed radiation.

Dependencies are inferred from the claim text.