US 2022/0029598 A1 · RESONANCE DEVICE

Abstract

A resonance device is provided that includes a resonator having a base, a vibrating arm extending from one end of the base along a first direction, a frame disposed around at least a part of the vibrating arm and holding the vibrating arm such that the vibrating arm is configured to vibrate, and a support arm connecting the base to the frame. Moreover, a first substrate is provided that includes a first recess forming at least a part of a vibration space for the resonator and a first limiting portion provided away from the support arm by a first distance in a thickness direction, in which the first distance is smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate.

Claims20

Dependent claims

A resonance device comprising:

a resonator including:
a base,
a vibrating arm extending from a first end of the base in a first direction,
a frame disposed around at least a part of the vibrating arm and configuring the vibrating arm to vibrate, and
a support arm connecting the base to the frame;
and
a first substrate including:
a first recess defining at least a part of a vibration space for the resonator, and
a first limiting portion disposed away from the support arm by a first distance in a thickness direction of the first substrate, with the first distance being smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate.

6 more elements

A resonance device comprising:

a resonator including:
a base,
a vibrating arm extending from a first end of the base along a first direction,
a frame disposed around at least a part of the vibrating arm and configuring the vibrating arm to vibrate, and
a support arm connecting the base to the frame;
a first substrate including a first recess defining at least a part of a vibration space for the resonator;
a second substrate facing the first substrate with the resonator interposed therebetween and including a second recess defining at least a part of the vibration space for the resonator;
and
a bonding portion configured to bond the resonator and the second substrate, with the bonding portion providing a predetermined distance between a surface of the second substrate facing the resonator and the support arm in a thickness direction of the second substrate,
wherein the predetermined distance is smaller than a distance between the vibrating arm and a bottom surface of the second recess in the thickness direction of the second substrate.

7 more elements

Dependencies are inferred from the claim text.

Resonance device

Life of this patent

Resonance device

Life of this patent

Abstract

Claims20