Optical waveguide device and laser apparatus including the same
AssigneeElectronics and Telecommunications Research Institute
InventorsOh Kee KWON, Su Hwan OH, Chul-Wook LEE, Kisoo KIM
Life of this patent
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Abstract
Provided are an optical waveguide device and a laser apparatus including the same. The optical waveguide device includes a peripheral part disposed on an edge region of a substrate, an air pocket disposed on a central region of the substrate within the peripheral part, an optical waveguide comprising a core layer, which is disposed on an upper portion of the substrate within the air pocket to extend in a first direction, and an electrode on the core layer, and a plurality of hinges disposed on the air pocket to connect the optical waveguide to the peripheral part in a second direction crossing the first direction.
Claims19
An optical waveguide device comprising:
- a peripheral part disposed on an edge region of a substrate;
- an air pocket disposed on a central region of the substrate within the peripheral part;
- an optical waveguide comprising a core layer, which is disposed on an upper portion of the substrate within the air pocket to extend in a first direction, and an electrode on the core layer;
- and
- a plurality of hinges disposed on the air pocket to connect the optical waveguide to the peripheral part in a second direction crossing the first direction.
A laser apparatus comprising:
- an active device disposed on one side of a substrate to generate laser light;
- an optical waveguide device disposed on the other side of the substrate to tune a peak wavelength of the laser light;
- and
- a phase controller disposed on the substrate between the active device and the optical waveguide device to control a phase of the laser light,
- wherein the optical waveguide device comprises:
- a peripheral part disposed on an edge region of the substrate;
- an air pocket disposed on a central region of the substrate within the peripheral part;
- an optical waveguide comprising a core layer, which is disposed on an upper portion of the substrate within the air pocket to extend in a first direction, and an electrode on the core layer;
- and
- a plurality of hinges disposed on the air pocket to connect the optical waveguide to the peripheral part in a second direction crossing the first direction.
A laser apparatus comprising:
- a substrate having a DBR section, a phase section, and a gain section;
- a lower clad layer disposed on the substrate;
- an air pocket disposed between the substrate and the lower clad layer in the DBR section;
- a core layer disposed on the lower clad layer to extend in a first direction;
- an upper clad layer disposed on the core layer and the lower clad layer outside the core layer;
- a protective layer on the upper clad layer in the DBR section and the phase section;
- electrodes aligned with the core layer and disposed on the protective layer in the DBR section and the phase section and on the upper clad layer in the gain section;
- and
- a plurality of hinges disposed in the air pocket and separated from each other in the first direction.
Dependencies are inferred from the claim text.