Electrostatic discharge protection semiconductor structure and a method of manufacture

Abstract

A electrostatic discharge protection semiconductor structure is provided that includes a first protection stage, a second protection stage, and an inversion layer resistor arranged between the first protection stage and the second protection stage. The inversion layer resistor includes a p-doped substrate, a first n+-diffusion and a second n+-diffusion in the p-doped substrate, an inversion layer that is connecting the first n+-diffusion and the second n+-diffusion, and an oxide layer that covers the area between the first n+-diffusion and the second n+-diffusion.

Dependencies are inferred from the claim text.