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US 2022/0029019 A1Published application
Semiconductor memory structure having drain stressor, source stressor and buried gate
AssigneeNanya Technology Corporation
InventorCHENG-HSIANG FAN
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Abstract
The present disclosure provides a semiconductor memory structure. The semiconductor memory structure includes a substrate, a gate structure, a drain stressor and a source stressor. The gate structure is disposed in the substrate. Each of the source stressor and the drain stressor includes a strained part disposed in the substrate.
Claims9
A semiconductor memory structure, comprising:
- a substrate;
- a drain stressor, having a strained part disposed in the substrate;
- a source stressor, having a strained part disposed in the substrate;
- and
- a gate structure disposed in the substrate, between the drain stressor and the source stressor.
2 more elements
Dependencies are inferred from the claim text.